Aperture systems are an ion beam diagnostic tool for cropping or blanking the charged particle beam. The system is designed for power loads of up to 15 W and suitable for a wide pressure range down to ultra-high vacuum (UHV) conditions. The size of the aperture can be individually chosen.
Custom Solutions
Custom Solutions
We offer development of custom solutions to perfectly suit your implementation.
Special features
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aperture sizes and dimensions depending on your requirements
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mounted to a linear feedthrough in order to enable positioning into and out of the beam
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optionally highly sputter resistant materials (e.g. tungsten) are available and recommended for use with beams of heavy and/or highly energetic ions
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optional readout of charged particle currents on the aperture system with insulated aperture option and electrical feedthrough option
specifications
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maximum beam power |
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| pressure operating range | down to 1·10-10 mbar |
| travel length |
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| mounting flange |
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| maximum bakeout temperature | 150 °C |
| approx. box size (length x width x height) | 210 mm x 152 mm x 410 mm for DN100 CF flange |
Optional Supplementing Devices:
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current measurement device for all dimensions of electric current, starting at pA
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active cooling system for higher thermal loads
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optional extension to multi-jaw slit system