D.I.S products for simple and fast residual gas analysis as well as for partial and total pressure measurement.
D.I.S All-In-One Residual Gas Analyzer
951-S7-09-00003
- The D.I.S All-In-One Residual Gas Analyzer is a multipurpose and easy-to-use device for gas analysis and partial/total pressure measurement.
- Patented ion pulse technology!
- Total pressure measurement from atmospheric pressure down to 1x10-10 mbar.
- Simple and fast residual gas analysis in a broad pressure range from 1x10-5 mbar down to 1x10-10 mbar at high sample rates.
- Helium leaks detection without additional measurement equipment.
- Realtime vacuum process monitoring with detection of residual gas including heavy hydrocarbons.
- Easy partial pressure detection of standard air components.
- User-friendly and intuitive control software makes the operating of the D.I.S All-In-One Gas Analyzer simple and straightforward.
Figure 1: D.I.S All-In-One Residual Gas Analyzer with exposed vacuum side of the multipurpose device.
Special Features
- All-In-One residual gas analytics and partial/total pressure measurement device
- Total pressure measurement range from atmospheric pressure down to 1 x 10-10 mbar
- Fast and simple residual gas analysis in a broad pressure range from 1x10-5 mbar down to 1x10-10 mbar
- Mass resolution (R = m/Δm) of 50
- Mass range of up to 250 amu
- All required command & control components and power supplies onboard
- User-friendly and intuitive control software
- Data communication via ethernet connection.
- No magnetic fields and no RF-fields
OPTIONAL SUPPLEMENTAL DEVICES and features
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Computer for control software
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Higher mass range
TECHNICAL DATA
| total pressure measurement range | from atmospheric pressure down to 1 x 10-10 mbar |
| pressure operating range for gas analysis | from 1 x 10-5 mbar down to 1 x 10-10 mbar and better |
| mounting flange | DN 40 CF |
| data connection | Ethernet |
| power connection | included power adapter with connector plug |
| mass resolution (R = m/Δm) |
50 Δm ≤ 1 amu up to 50 amu Δm ≤ 2 amu up to 100 amu Δm ≤ 5 amu up to 250 amu |
| mass range | 1 to 250 amu |
| max. bakeout temperature | 120 ºC (on interface flange) |
| approx. device size (length x width x height) |
230 mm x 110 mm x 110 mm - vacuum side 470 mm x 110 mm x 110 mm - total |
More technical data on request.
Datasheet:
In preparation
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